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Journal description
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Details for article 12 of 18 found articles
| Title: |
Phase Formation in Ti–Co–N/CoSix/Si(100) and Ti–Co–Si–N/CoSix/Si(100) Systems by Diffusion Reactions: The Role of Nitrogen |
| Author: |
Vasiliev, A. G. Vasiliev, A. L. Zakharov, R. A. Orlikovsky, A. A. Horin, I. A. Eindou, M. |
| Appeared in: |
Russian microelectronics |
| Paging: | Volume 33 (2004) nr. 3 pages 147-151 |
| Year: |
2004 |
| Contents: | |
| Publisher: |
Kluwer Academic Publishers-Plenum Publishers, New York |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 12 of 18 found articles
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