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Journal description
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Details for article 10 of 18 found articles
| Title: |
Optimizing Light-Source Aperture for Off-Axis Illumination in Optical Nanolithography: Theoretical Consideration |
| Author: |
Ivin, V. V. Makhviladze, T. M. Valiev, K. A. |
| Appeared in: |
Russian microelectronics |
| Paging: | Volume 33 (2004) nr. 3 pages 127-136 |
| Year: |
2004 |
| Contents: | |
| Publisher: |
Kluwer Academic Publishers-Plenum Publishers, New York |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 10 of 18 found articles
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