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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 9 of 16 found articles
| Title: |
Novel Ion-Lens Configurations: A Further Step to 2-nm Ion-Beam Lithography |
| Author: |
V. A. Zhukov M. M. Nesterov |
| Appeared in: |
Russian microelectronics |
| Paging: | Volume 32 (2003) nr. 5 pages 6 p. |
| Year: |
2003-09/10-/10 |
| Contents: | |
| Publisher: |
Kluwer Academic/Plenum Publishers, New York, U.S.A. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 9 of 16 found articles
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