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Journal description
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Details for article 6 of 18 found articles
| Title: |
Formation and Properties of an Oxide Film on an Si3N4Surface under Thermal Oxidation |
| Author: |
Ivanchikov, A. E. Kisel', A. M. Plebanovich, V. I. Pachynin, V. I. Borisenko, V. E. |
| Appeared in: |
Russian microelectronics |
| Paging: | Volume 32 (2003) nr. 3 pages 145-150 |
| Year: |
2003 |
| Contents: | |
| Publisher: |
Kluwer Academic Publishers-Plenum Publishers, New York |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 6 of 18 found articles
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