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Journal description
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Details for article 9 of 20 found articles
| Title: |
Linear Standard for SEMAFM Microelectronics Dimensional Metrology in the Range 0.01100 μm |
| Author: |
Ch. P. Volk E. S. Gornev Yu. A. Novikov Yu. V. Ozerin Yu. I. Plotnikov A. M. Prokhorov A. V. Rakov |
| Appeared in: |
Russian microelectronics |
| Paging: | Volume 31 (2002) nr. 4 pages 17 p. |
| Year: |
2002-07/08-/08 |
| Contents: | |
| Publisher: |
Kluwer Academic/Plenum Publishers, New York, U.S.A. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 9 of 20 found articles
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