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Journal description
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Details for article 1 of 16 found articles
| Title: |
Dry Etching of Copper Using Chlorine: A Review |
| Author: |
A. M. Efremov V. I. Svettsov |
| Appeared in: |
Russian microelectronics |
| Paging: | Volume 31 (2002) nr. 3 pages 14 p. |
| Year: |
2002-05/06-/06 |
| Contents: | |
| Publisher: |
Kluwer Academic/Plenum Publishers, New York, U.S.A. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 1 of 16 found articles
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