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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 8 of 14 found articles
| Title: |
Contact TiSi2and Barrier TiN Layers for ULSI Multilevel Metallization |
| Author: |
Vasiliev, A. G. Orlikovsky, A. A. Rodatis, V. V. Horin, I. A. |
| Appeared in: |
Russian microelectronics |
| Paging: | Volume 31 (2001) nr. 1 pages 7-12 |
| Year: |
2001 |
| Contents: | |
| Publisher: |
Kluwer Academic Publishers-Plenum Publishers, New York |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 8 of 14 found articles
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