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                                       Details for article 10 of 14 found articles
 
 
  Interaction of a Microwave and a Low-Pressure Plasma under Electron Cyclotron Resonance
 
 
Title: Interaction of a Microwave and a Low-Pressure Plasma under Electron Cyclotron Resonance
Author: Petrin, A. B.
Appeared in: Russian microelectronics
Paging: Volume 31 (2001) nr. 1 pages 27-36
Year: 2001
Contents:
Publisher: Kluwer Academic Publishers-Plenum Publishers, New York
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 10 of 14 found articles
 
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