Comparative Analysis of Scanning Electron Microscopy Techniques for Semiconductors: Electron-Beam-Induced Potential Method, Single-Contact Electron-Beam-Induced Current Method, and Thermoacoustic Detection
Titel:
Comparative Analysis of Scanning Electron Microscopy Techniques for Semiconductors: Electron-Beam-Induced Potential Method, Single-Contact Electron-Beam-Induced Current Method, and Thermoacoustic Detection
Auteur:
Rau, E. I. Gostev, A. V. Shiqiu, Zhu Phang, D. Chan, D. Thong, D. Wong, W.
Verschenen in:
Russian microelectronics
Paginering:
Jaargang 30 (2001) nr. 4 pagina's 207-218
Jaar:
2001
Inhoud:
Uitgever:
Kluwer Academic Publishers-Plenum Publishers, New York