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  Atomic Layer Deposition and Thermal Transformations of Thin Titanium–Vanadium Oxide Films
 
 
Title: Atomic Layer Deposition and Thermal Transformations of Thin Titanium–Vanadium Oxide Films
Author: Abdulagatov, A. I.
Maksumova, A. M.
Palchaev, D. K.
Rabadanov, M. Kh.
Abdulagatov, I. M.
Appeared in: Russian journal of applied chemistry
Paging: Volume 94 () nr. 7 pages 890-902
Year: 2021-10-05
Contents:
Publisher: Pleiades Publishing, Moscow
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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