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Journal description
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Details for article 20 of 21 found articles
| Title: |
The Effect of Surface Polarity on the CMP Behavior of 6H-SiC Substrates |
| Author: |
Chen, Guomei Du, Chunkuan Ni, Zifeng Liu, Yuanxiang Zhao, Yongwu |
| Appeared in: |
Russian journal of applied chemistry |
| Paging: | Volume 93 () nr. 6 pages 832-837 |
| Year: |
2020-07-17 |
| Contents: | |
| Publisher: |
Pleiades Publishing, Moscow |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 20 of 21 found articles
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