Volatile Heteroligand Complexes of Copper(II): New Precursors for Chemical Vapor Deposition of Copper Films
Titel:
Volatile Heteroligand Complexes of Copper(II): New Precursors for Chemical Vapor Deposition of Copper Films
Auteur:
Krisyuk, B. V. Turgambaeva, A. E. Stabnikov, P. A. Igumenov, I. K. Sysoev, S. V. Rumyantsev, Yu. M. Prokhorova, S. A. Maksimovskii, E. A. Maslova, O. V.