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                                       Details for article 80 of 86 found articles
 
 
  Thin Near-Surface Layer in a Resist Film
 
 
Title: Thin Near-Surface Layer in a Resist Film
Author: Trigub, V. I.
Plotnov, A. V.
Kiselev, A. N.
Appeared in: Russian journal of applied chemistry
Paging: Volume 76 (2003) nr. 8 pages 1360-1361
Year: 2003
Contents:
Publisher: Kluwer Academic Publishers-Plenum Publishers, New York
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 80 of 86 found articles
 
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