Diagnostics of semiconductor structures by means of an apertureless near-field terahertz microscope
Titel:
Diagnostics of semiconductor structures by means of an apertureless near-field terahertz microscope
Auteur:
Trukhin, V. N. Golubo, A. O. Lyutetsky, A. V. Matveyev, B. A. Pikhtin, N. A. Samoilov, L. L. Sapozhnikov, I. D. Tarasov, I. S. Fel’shtyn, M. L. Khor’kov, D. P.