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Details for article 11 of 16 found articles
| Title: |
Quantitative Analysis of Mass Spectrometric Signals for the Estimation of Fluorine Radical Densities in CF4 and CF4/O2 Plasmas |
| Author: |
Li, Jie Kim, Yongjae Han, Seunghun Niu, Jingjie Chae, Heeyeop |
| Appeared in: |
Plasma chemistry and plasma processing |
| Paging: | Volume 42 () nr. 4 pages 989-1002 |
| Year: |
2022-05-25 |
| Contents: | |
| Publisher: |
Springer US, New York |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 11 of 16 found articles
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