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Journal description
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Details for article 8 of 9 found articles
| Title: |
Time Resolved Spectroscopic Characterization of a-C:H Deposition by Methane and Removal by Oxygen Inductively Coupled RF Plasma |
| Author: |
Bišćan, M. Kregar, Z. Krstulović, N. Milošević, S. |
| Appeared in: |
Plasma chemistry and plasma processing |
| Paging: | Volume 30 (2010) nr. 3 pages 401-412 |
| Year: |
2010 |
| Contents: | |
| Publisher: |
Springer US, Boston |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 8 of 9 found articles
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