|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 6 of 10 found articles
| Title: |
Plasma Characteristics and Antenna Electrical Characteristics of an Internal Linear Inductively Coupled Plasma Source with a Multi-Polar Magnetic Field |
| Author: |
Kim, Kyong Nam Lim, Jong Hyeuk Park, Jung Kyun Yeom, Geun Young Lee, Sung Hee Lee, Jae Koo |
| Appeared in: |
Plasma chemistry and plasma processing |
| Paging: | Volume 28 (2007) nr. 1 pages 147-158 |
| Year: |
2007 |
| Contents: | |
| Publisher: |
Springer US, Boston |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 6 of 10 found articles
| << previous | next >> |