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Journal description
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Details for article 6 of 16 found articles
| Title: |
Etching Mechanism of Pb(Zr,Ti)O3 Thin Films in Cl2/Ar Plasma |
| Author: |
Efremov, A.M. Kim, D.P. Kim, K.T. Kim, C.I. |
| Appeared in: |
Plasma chemistry and plasma processing |
| Paging: | Volume 24 (2004) nr. 1 pages 13-28 |
| Year: |
2004 |
| Contents: | |
| Publisher: |
Kluwer Academic Publishers-Plenum Publishers, New York |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 6 of 16 found articles
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