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Journal description
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Details for article 20 of 20 found articles
| Title: |
Transient Response of Radio Frequency Inductively Coupled Plasma for Pulse Modulation |
| Author: |
K. C. Paul J. Mostaghimi T. Ishigaki T. Sakuta |
| Appeared in: |
Plasma chemistry and plasma processing |
| Paging: | Volume 21 (2001) nr. 3 pages 30 p. |
| Year: |
2001-09 |
| Contents: | |
| Publisher: |
Kluwer Academic/Plenum Publishers, New York, U.S.A. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 20 of 20 found articles
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