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Journal description
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Details for article 9 of 21 found articles
| Title: |
Iodine- and Bromine-Based Dry Etching of LaCaMnO3 |
| Author: |
Wang, J. J. Cho, H. Childress, J. R. Pearton, S. J. Sharifi, F. Dahmen, K. H. Gillman, E. S. |
| Appeared in: |
Plasma chemistry and plasma processing |
| Paging: | Volume 19 (1999) nr. 2 pages 229-239 |
| Year: |
1999 |
| Contents: | |
| Publisher: |
Kluwer Academic Publishers-Plenum Publishers, New York |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 9 of 21 found articles
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