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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 4 of 21 found articles
| Title: |
Deposition of Diamond-Like Carbon Film and Mass Spectrometry Measurement in CH4/O2 RF Plasma |
| Author: |
Ken-ichi Tanaka Nobuki Mutsukura |
| Appeared in: |
Plasma chemistry and plasma processing |
| Paging: | Volume 19 (1999) nr. 2 pages 11 p. |
| Year: |
1999-06 |
| Contents: | |
| Publisher: |
Kluwer Academic/Plenum Publishers, New York, U.S.A. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 4 of 21 found articles
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