Single etch grating couplers for mass fabrication with DUV lithography
Titel:
Single etch grating couplers for mass fabrication with DUV lithography
Auteur:
Halir, R. Zavargo-Peche, L. Xu, D.-X. Cheben, P. Ma, R. Schmid, J. H. Janz, S. Densmore, A. Ortega-Moñux, A. Molina-Fernández, Í. Fournier, M. Fédeli, J.-M.