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Details for article 2 of 19 found articles
| Title: |
Creation of Calibrated Samples of a Measure with Relief Elements Less Than 100 nm |
| Author: |
Efimenkov, Yu. R. Zolotarevskii, Yu. M. Lyaskovskii, V. L. Min’kov, K. N. Samoilenko, A. A. |
| Appeared in: |
Measurement techniques |
| Paging: | Volume 58 (2016) nr. 11 pages 1214-1215 |
| Year: |
2016 |
| Contents: | |
| Publisher: |
Springer US, New York |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 2 of 19 found articles
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