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  Ceria coated hexagonal mesoporous silica core–shell composite particle abrasives for improved chemical–mechanical planarization performance
 
 
Title: Ceria coated hexagonal mesoporous silica core–shell composite particle abrasives for improved chemical–mechanical planarization performance
Author: Chen, Ailian
Wang, Wanying
Ma, Xiangyu
Chen, Yang
Appeared in: Journal of porous materials
Paging: Volume 26 (2018) nr. 4 pages 1005-1015
Year: 2018
Contents:
Publisher: Springer US, New York
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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