Enhancement of silicon nitride layer performance by Gallium–Copper–Zinc tri-layer thin films structure via plasma featured chemical vapour deposition route
Titel:
Enhancement of silicon nitride layer performance by Gallium–Copper–Zinc tri-layer thin films structure via plasma featured chemical vapour deposition route
Auteur:
Venkatesh, R. Singh, Pradeep Kumar Venkatasubramanian, R. Vaidyanathan, Ishwarya Mayiladuthurai Deshwal, Deepti Soudagar, Manzoore Elahi M. Mohanavel, Vinayagam Al Obaid, Sami Alharbi, Sulaiman Ali
Verschenen in:
Journal of materials science. Materials in electronics