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Fabrication of uniform submicron metal bump arrays based on undercut sacrificial layer for lift-off process |
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Titel: |
Fabrication of uniform submicron metal bump arrays based on undercut sacrificial layer for lift-off process |
Auteur: |
Lai, Zelei Zou, Zhenyou Ye, Jinyu Lin, Yibin Zhou, Xiongtu Sun, Jie Guo, Tailiang Wu, Chaoxing Yan, Qun Sun, Lei Zhang, Yongai |
Verschenen in: |
Journal of materials science. Materials in electronics |
Paginering: |
Jaargang 36 () nr. 12 pagina's xx |
Jaar: |
2025-04-21 |
Inhoud: |
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Uitgever: |
Springer US, New York |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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