Texturing of silicon nitride passivation layers on functional behaviour study of polycrystalline silicon (p-Si) made with plasma enhanced chemical vapour deposition
Titel:
Texturing of silicon nitride passivation layers on functional behaviour study of polycrystalline silicon (p-Si) made with plasma enhanced chemical vapour deposition
Auteur:
Rathinavelu, Venkatesh Upadhyay, Viyat Varun Prabagaran, S. Govindarajan, S. Verma, Apurv Soudagar, Manzoore Elahi M. Vinayagam, Mohanavel Alotaibi, Majed A. Seikh, Asiful H.
Verschenen in:
Journal of materials science. Materials in electronics