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Ferroelectricity and reliability performance of HfZrO films by N-plasma treatment on TiN electrode |
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Titel: |
Ferroelectricity and reliability performance of HfZrO films by N-plasma treatment on TiN electrode |
Auteur: |
Li, Yue Feng, Tianyang Sun, Tangyou Chen, Yonghe Zhang, Fabi Fu, Tao Wangyang, Peihua Li, Haiou Liu, Xingpeng |
Verschenen in: |
Journal of materials science. Materials in electronics |
Paginering: |
Jaargang 33 () nr. 30 pagina's 23341-23350 |
Jaar: |
2022-09-19 |
Inhoud: |
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Uitgever: |
Springer US, New York |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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