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Details for article 73 of 78 found articles
| Title: |
The effect of post-deposition annealing on the chemical, structural and electrical properties of Al/ZrO2/La2O3/ZrO2/Al high-k nanolaminated MIM capacitors |
| Author: |
Patil, Sumit R. Barhate, Viral N. Patil, Vilas S. Agrawal, Khushabu S. Mahajan, Ashok M. |
| Appeared in: |
Journal of materials science. Materials in electronics |
| Paging: | Volume 33 () nr. 14 pages 11227-11235 |
| Year: |
2022-04-18 |
| Contents: | |
| Publisher: |
Springer US, New York |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 73 of 78 found articles
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