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Integration of silicon nitride waveguide in Ge-on-insulator substrates for monolithic solutions in optoelectronics |
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Title: |
Integration of silicon nitride waveguide in Ge-on-insulator substrates for monolithic solutions in optoelectronics |
Author: |
Xiong, Wenjuan Wang, Guilei Du, Yong Lin, Hongxiao Zhao, Xuewei Yu, Jiahan Kong, Zhenzhen Dong, Yan Jiang, Haojie Tao, Yang Li, Junfeng Wang, Wenwu Radamson, Henry H. |
Appeared in: |
Journal of materials science. Materials in electronics |
Paging: |
Volume 32 () nr. 5 pages 6133-6140 |
Year: |
2021-02-09 |
Contents: |
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Publisher: |
Springer US, New York |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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