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Growth of hexagonal boron nitride films on silicon substrates by low-pressure chemical vapor deposition |
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Titel: |
Growth of hexagonal boron nitride films on silicon substrates by low-pressure chemical vapor deposition |
Auteur: |
Chen, Xi Tan, Chunbo Liu, Xiaohang Luan, Kairan Guan, Yufeng Liu, Xiuhuan Zhao, Jihong Hou, Lixin Gao, Yanjun Chen, Zhanguo |
Verschenen in: |
Journal of materials science. Materials in electronics |
Paginering: |
Jaargang 32 () nr. 3 pagina's 3713-3719 |
Jaar: |
2021-01-06 |
Inhoud: |
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Uitgever: |
Springer US, New York |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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