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Study of the yield improvement and reliability of 28 nm advanced chips based on structural analysis |
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Titel: |
Study of the yield improvement and reliability of 28 nm advanced chips based on structural analysis |
Auteur: |
Zhao, Dongyan Wang, Yubo Shao, Jin Chen, Yanning Fu, Zhen Liu, Fang Yang, Hong Du, Anyan Li, Junfeng Wang, Wenwu Li, LianLian |
Verschenen in: |
Journal of materials science. Materials in electronics |
Paginering: |
Jaargang 32 () nr. 13 pagina's 18076-18086 |
Jaar: |
2021-06-22 |
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Uitgever: |
Springer US, New York |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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