Effect of RF magnetron sputtering parameters on the optimization of the discharge capacity of ternary lithium oxide thin films
Titel:
Effect of RF magnetron sputtering parameters on the optimization of the discharge capacity of ternary lithium oxide thin films
Auteur:
Lopez, Daniel Andres Sanchez Chagas, Luciana Gomes Batista, Aline Domingues Guaita, Maria Gabriella Detone Amorin, Luís Henrique Cardozo da Silva, Paulo Rogério Catarini Yamanishi, Gustavo Zaia, Dimas Augusto Morozin de Santana, Henrique Urbano, Alexandre
Verschenen in:
Journal of materials science. Materials in electronics