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Microstructure and bending piezoelectric characteristics of AlN film for high-frequency flexible SAW devices |
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Titel: |
Microstructure and bending piezoelectric characteristics of AlN film for high-frequency flexible SAW devices |
Auteur: |
Li, Kaixuan Wang, Fang Deng, Meng Hu, Kai Song, Dianyou Hao, Yaowu Di, Huanhuan Dong, Kaifei Yan, Shuo Song, Zhitang Zhang, Kailiang |
Verschenen in: |
Journal of materials science. Materials in electronics |
Paginering: |
Jaargang 32 () nr. 10 pagina's 13146-13155 |
Jaar: |
2021-05-07 |
Inhoud: |
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Uitgever: |
Springer US, New York |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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