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Investigation on the formation technique of SiGe Fin for the high mobility channel FinFET device |
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Titel: |
Investigation on the formation technique of SiGe Fin for the high mobility channel FinFET device |
Auteur: |
Zhao, Zhiqian Cheng, Xiaohong Li, Yongliang Zan, Ying Liu, Haoyan Wang, Guilei Du, Anyan Li, Junjie Zhang, Qingzhu Xu, Gaobo Ma, Xueli Wang, Xiaolei Yang, Hong Xu, Jing Luo, Jun Li, JunFeng Yin, Huaxiang Wang, Wenwu |
Verschenen in: |
Journal of materials science. Materials in electronics |
Paginering: |
Jaargang 31 () nr. 8 pagina's 5854-5860 |
Jaar: |
2019-12-02 |
Inhoud: |
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Uitgever: |
Springer US, New York |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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