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Effect of precursor stoichiometry on morphology, phase purity, and texture formation of hot filament CVD diamond films grown on Si (100) substrate |
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Titel: |
Effect of precursor stoichiometry on morphology, phase purity, and texture formation of hot filament CVD diamond films grown on Si (100) substrate |
Auteur: |
Ahmed, Raju Siddique, Anwar Saha, Rony Anderson, Jonathan Engdahl, Chris Holtz, Mark Piner, Edwin |
Verschenen in: |
Journal of materials science. Materials in electronics |
Paginering: |
Jaargang 31 () nr. 11 pagina's 8597-8606 |
Jaar: |
2020-04-22 |
Inhoud: |
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Uitgever: |
Springer US, New York |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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