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Influence of various NO annealing conditions on N-type and P-type 4H-SiC MOS capacitors |
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Titel: |
Influence of various NO annealing conditions on N-type and P-type 4H-SiC MOS capacitors |
Auteur: |
Jia, Yifan Lv, Hongliang Tang, Xiaoyan Han, Chao Song, Qingwen Zhang, Yimen Zhang, Yuming Dimitrijev, Sima Han, Jisheng Haasmann, Daniel |
Verschenen in: |
Journal of materials science. Materials in electronics |
Paginering: |
Jaargang 30 (2019) nr. 11 pagina's 10302-10310 |
Jaar: |
2019 |
Inhoud: |
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Uitgever: |
Springer US, New York |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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