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Improvements of epitaxial quality and stress state of GaN grown on SiC by in situ SiNx interlayer |
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Titel: |
Improvements of epitaxial quality and stress state of GaN grown on SiC by in situ SiNx interlayer |
Auteur: |
Huang, Zhen Zhang, Yuantao Deng, Gaoqiang Li, Baozhu Cui, Shuang Liang, Hongwei Chang, Yuchun Song, Junfeng Zhang, Baolin Du, Guotong |
Verschenen in: |
Journal of materials science. Materials in electronics |
Paginering: |
Jaargang 27 (2016) nr. 10 pagina's 10003-10009 |
Jaar: |
2016 |
Inhoud: |
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Uitgever: |
Springer US, New York |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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