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The effect of post-annealing under CdCl2 atmosphere on the properties of ITO thin films deposited by DC magnetron sputtering |
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Titel: |
The effect of post-annealing under CdCl2 atmosphere on the properties of ITO thin films deposited by DC magnetron sputtering |
Auteur: |
Wang, Shenghao Zhang, Jingquan Wang, Bo Feng, Lianghuan Cai, Yaping Wu, Lili Li, Wei Lei, Zhi Li, Bing |
Verschenen in: |
Journal of materials science. Materials in electronics |
Paginering: |
Jaargang 21 (2009) nr. 5 pagina's 441-444 |
Jaar: |
2009 |
Inhoud: |
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Uitgever: |
Springer US, Boston |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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