Study of in-depth strain variation in ion-irradiated GaN
Titel:
Study of in-depth strain variation in ion-irradiated GaN
Auteur:
Herms, Martin Zeimer, Ute Sonia, Gnanapragasam Brunner, Frank Richter, Eberhard Weyers, Markus Tränkle, Günther Behm, Thomas Irmer, Gert Pensl, Gerhard Denker, Andrea Opitz-Coutureau, Jörg
Verschenen in:
Journal of materials science. Materials in electronics