Growth and characterization of shape memory alloy thin films for Si microactuator technologies
Titel:
Growth and characterization of shape memory alloy thin films for Si microactuator technologies
Auteur:
Yaakoubi, N. Serre, C. Martínez, S. Pérez-Rodríguez, A. Morante, J. R. Esteve, J. Montserrat, J. Dufour-Gergam, E. Granchamp, J. P. Bosseboeuf, A. Frantz-Rodriguez, N.
Verschenen in:
Journal of materials science. Materials in electronics