|
Characterization of deep-level defects in highly-doped silicon with asymmetric structure by transient capacitance spectroscopy |
|
|
|
Titel: |
Characterization of deep-level defects in highly-doped silicon with asymmetric structure by transient capacitance spectroscopy |
Auteur: |
Liu, Chixian Dou, Wei Pan, Changyi Yin, Ziwei Liu, Xiaoyan Ling, Jingwei Chen, Tianye Shan, Yufeng Zhu, Jiaqi Deng, Huiyong Dai, Ning |
Verschenen in: |
Journal of materials science |
Paginering: |
Jaargang 58 () nr. 26 pagina's 10651-10659 |
Jaar: |
2023-06-26 |
Inhoud: |
|
Uitgever: |
Springer US, New York |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
|
|
|
|