Electrical and optical properties of titanium oxynitride thin films
Titel:
Electrical and optical properties of titanium oxynitride thin films
Auteur:
Mucha, Nikhil R. Som, Jacob Shaji, Surabhi Fialkova, Svitlana Apte, Prakash R. Balasubramanian, Balamurugan Shield, Jeffrey E. Anderson, Mark Kumar, Dhananjay