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Journal description
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Details for article 32 of 35 found articles
| Title: |
Structural and electrical properties of Ge-doped ZrO2 thin films grown by atomic layer deposition for high-k dielectrics |
| Author: |
Park, Bo-Eun Lee, Yujin Oh, Il-Kwon Noh, Wontae Gatineau, Satoko Kim, Hyungjun |
| Appeared in: |
Journal of materials science |
| Paging: | Volume 53 (2018) nr. 21 pages 15237-15245 |
| Year: |
2018 |
| Contents: | |
| Publisher: |
Springer US, New York |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 32 of 35 found articles
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