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                                       Details for article 36 of 56 found articles
 
 
  Patterning SiC nanoprecipitate in Si single crystals by simultaneous dual- beam ion implantation
 
 
Title: Patterning SiC nanoprecipitate in Si single crystals by simultaneous dual- beam ion implantation
Author: Velişa, Gihan
Trocellier, Patrick
Thomé, Lionel
Vaubaillon, Sylvain
Sattonnay, Gaël
Miro, Sandrine
Serruys, Yves
Appeared in: Journal of materials science
Paging: Volume 49 (2014) nr. 14 pages 4899-4904
Year: 2014
Contents:
Publisher: Springer US, Boston
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 36 of 56 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands