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Tunable surface hardness and dielectric constant of SiCxOy thin film converted from solution-processed organosilicon compound |
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Titel: |
Tunable surface hardness and dielectric constant of SiCxOy thin film converted from solution-processed organosilicon compound |
Auteur: |
Lee, Pyoung-Chan Kim, Sieun Hwang, Taeseon Oh, Joon-Suk Oh, Yong-Soo Pu, Lyongsun Kim, Byung-Woo Lee, Youngkwan Choi, Hyouk Ryeol Jeoung, Sun Kyoung Nam, Jae-Do |
Verschenen in: |
Journal of materials science |
Paginering: |
Jaargang 47 (2012) nr. 11 pagina's 4540-4545 |
Jaar: |
2012 |
Inhoud: |
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Uitgever: |
Springer US, Boston |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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