Effects of annealing temperature on the optical, bonding, structural and electrical properties of nitrogenated amorphous carbon thin films grown by surface wave microwave plasma chemical vapor deposition
Titel:
Effects of annealing temperature on the optical, bonding, structural and electrical properties of nitrogenated amorphous carbon thin films grown by surface wave microwave plasma chemical vapor deposition
Auteur:
Rusop, M. Omer, A. M. M. Adhikari, S. Adhikary, S. Uchida, H. Soga, T. Jimbo, T. Umeno, M.
Verschenen in:
Journal of materials science
Paginering:
Jaargang 41 (2006) nr. 2 pagina's 537-547
Jaar:
2006
Inhoud:
Uitgever:
Kluwer Academic Publishers-Plenum Publishers, New York