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Journal description
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Details for article 15 of 18 found articles
| Title: |
Multiple time-series convolutional neural network for fault detection and diagnosis and empirical study in semiconductor manufacturing |
| Author: |
Hsu, Chia-Yu Liu, Wei-Chen |
| Appeared in: |
Journal of intelligent manufacturing |
| Paging: | Volume 32 () nr. 3 pages 823-836 |
| Year: |
2020-05-18 |
| Contents: | |
| Publisher: |
Springer US, New York |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 15 of 18 found articles
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