|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 24 of 33 found articles
| Title: |
Nonstationary signal analysis and support vector machine based classification for vibration based characterization and monitoring of slit valves in semiconductor manufacturing |
| Author: |
Musselman, M. Xie, H. Djurdjanovic, D. |
| Appeared in: |
Journal of intelligent manufacturing |
| Paging: | Volume 30 () nr. 3 pages 1099-1110 |
| Year: |
2017 |
| Contents: | |
| Publisher: |
Springer US, New York |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 24 of 33 found articles
| << previous | next >> |