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Journal description
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Details for article 31 of 44 found articles
| Title: |
Invention principles and contradiction matrix for semiconductor manufacturing industry: chemical mechanical polishing |
| Author: |
Sheu, D. Daniel Chen, Chia-Hung Yu, Pang-Yen |
| Appeared in: |
Journal of intelligent manufacturing |
| Paging: | Volume 23 (2010) nr. 5 pages 1637-1648 |
| Year: |
2010 |
| Contents: | |
| Publisher: |
Springer US, Boston |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 31 of 44 found articles
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